发明名称 METALLIZATION POLYIMIDE FILM
摘要 PROBLEM TO BE SOLVED: To provide a metallization polyimide film excellent in the adhesion of copper foil and a substrate, insulation reliability, and migration resistance, and is adapted to practical use as a substrate of a highly reliable COF, TAB, an FPC, a semiconductor package, or the like. SOLUTION: In a metallization polyimide film formed by laminating (1) a first metal layer not containing Cu, and (2) a second metal layer principally comprising Cu sequentially on at least one side of a polyimide film, the amount of residual metal other than Cu on the surface of the polyimide film treated with a sulphuric acid/hydrogen peroxide based etching reagent after the metallization polyimide film is heat-treated at 150°C is 1μg/cm<SP>2</SP>or less. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007141877(A) 申请公布日期 2007.06.07
申请号 JP20050329138 申请日期 2005.11.14
申请人 TOYOBO CO LTD 发明人 OKUYAMA TETSUO;TSUCHIYA TOSHIYUKI;YOSHIDA TAKESHI;MAEDA SATOSHI
分类号 H01L21/60;C08G73/10;H01L23/12;H01L23/32 主分类号 H01L21/60
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