METHOD AND APPARATUS FOR MANUFACTURING A MICROMECHANICAL DEVICE,申请号EP19990909091-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MANUFACTURING A MICROMECHANICAL DEVICE
摘要
申请公布号	EP0983610(A1)	申请公布日期	2000.03.08
申请号	EP19990909091	申请日期	1999.03.16
申请人	SURFACE TECHNOLOGY SYSTEMS LIMITED	发明人	MCQUARRIE, ANDREW, DUNCAN
分类号	G01P9/04;B01J7/00;B01J12/00;B01J19/08;B01J19/24;B81B3/00;B81C1/00;C01B7/24;C07C17/00;G01C19/56;G01P15/08;G01P15/125;H01L21/306;H01L21/3065;H01L21/308;H01L29/84;(IPC1-7):H01L21/306	主分类号	G01P9/04
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