| 摘要 |
PROBLEM TO BE SOLVED: To provide a rack for washing a substrate to be used for washing a substrate and a frame to be used for the rack in order to solve a problem that a conventional rack for washing a substrate limits the size of the substrate and different racks for washing substrates have to be made available for washing substrates with different sizes and it costs much and requires spaces for storage. SOLUTION: The rack for washing a substrate comprises a frame body part which contains in the inside a rack part for fixing a substrate to be washed by sandwiching the substrate back and forth and a movable stand having a function as a stand for the substrate to be washed and fixing the substrate and right and left hangers which are attached to the upper part of the frame body part and become hooking parts for pulling up the substrate at a hanging tool, wherein the rack for washing a substrate is equipped with rack fixing frames each having a plurality of grooves at equal intervals in the inside of the right and left upper joint materials of the frame body. COPYRIGHT: (C)2007,JPO&INPIT
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