发明名称 Sensor block
摘要 The present invention provides a sensor block, which comprises a plurality of sensor chips in combination. Each sensor chip includes a semiconductor substrate having a detection unit formed therein, and two glass substrates bonded to both sides of the semiconductor substrate. One of the glass substrates is shared among the sensor chips and serves as a base block to support the sensor chips.
申请公布号 EP1783498(A2) 申请公布日期 2007.05.09
申请号 EP20060123534 申请日期 2006.11.06
申请人 MITUTOYO CORPORATION 发明人 MATSUMIYA, SADAYUKI;TOMINAGA, ATSUSHI
分类号 G01P15/18;G01P1/02;G01P15/08 主分类号 G01P15/18
代理机构 代理人
主权项
地址
您可能感兴趣的专利