| 摘要 |
A contactor apparatus having a first contactor ( 2 ) and a second contactor ( 4 ) acquires an electrical conduction to a plurality of semiconductor devices formed on a semiconductor wafer ( 6 ). The first contactor ( 2 ) has contacts ( 2 b) which are directly brought into contact with power supply terminals ( 6 a) of the semiconductor devices. The second contactor ( 4 ) is movable relative to the first contactor ( 2 ) and has contacts ( 4 a) which are brought into contact with signal terminals ( 6 b) of the semiconductor devices. Thereby, the number of contacts to be formed on a single contactor can be reduced and the number of pattern wirings can also be reduced, which makes the fabrication of the contactor easier. |
