| 摘要 |
An evaporation source machine and a vacuum deposition apparatus using the same, including a vacuum chamber, a crucible, a heater, and a multi-layered inner plate positioned inside the crucible, wherein each layer of the multi-layered inner plate has at least one aperture, such that evaporated material may be discharged from a bottom of the crucible through the multi-layered inner plate into the vacuum chamber.
|
