| 发明名称 |
PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY |
| 摘要 |
A PVD target structure for use in physical vapor deposition. The PVD target structure includes a consumable slab of source material and one or more detectors for indicating when the slab of source material is approaching or has been reduced to a given quantity representing a service lifetime endpoint of the target structure.
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| 申请公布号 |
US2007068803(A1) |
申请公布日期 |
2007.03.29 |
| 申请号 |
US20060427602 |
申请日期 |
2006.06.29 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HSIAO YI-LI;HWANG JERRY;SHEU JYH-CHERNG;SHEU LAWRANCE;WANG JEAN;YU CHEN-HUA |
| 分类号 |
C23C14/00 |
主分类号 |
C23C14/00 |
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