ELECTRIC CONTACT SWITCHING DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce an operating time for switching electric contacts in comparison to a thermally driven device for switching electric contacts. SOLUTION: A device for switching electric contacts comprises: a semiconductor substrate 1 which has a container 2 for containing a conductive fluid 3 movably; an insulation substrate 5 which has a plurality of contacts 4 projecting into the container 2, and is bonded to the surface of the semiconductor substrate 1; and an actuator 6 which is formed on the opposite surface of the semiconductor substrate 1 to the bonding surface of the insulation substrate 5, and partially deforms the semiconductor substrate 1 to move the conductive fluid 3 in the container 2. When applied voltage actuates the actuator 6, the top of the actuator 6 presses a protrusion 10, a diaphragm 1b is deformed, and a volume of a cavity 2a is reduced. This moves the conductive fluid 3 to the top side of a groove 2b to make contact between the contacts 4 connected to electrode pads 81, 82respectively through the conductive fluid 3. COPYRIGHT: (C)2007,JPO&INPIT