| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polarization measuring device capable of miniaturization and cost reduction following a simple constitution, and capable of measuring the polarization state of light with accuracy required for an exposure device. <P>SOLUTION: This polarization measuring device is equipped with: an aperture member 21 having the first aperture 21a and the second aperture 21b adjacent mutually on a prescribed surface; the first polarizer 23a for emitting selectively the first linearly polarized light having a polarization direction in the first direction, in light entering through the first aperture; the second polarizer 23b for emitting selectively the second linearly polarized light having a polarization direction in the second direction approximately orthogonal to the first direction, in light entering through the second aperture; and photodetection parts 24a, 34b for detecting the first linearly polarized light emitted from the first polarizer and second linearly polarized light emitted from the second polarizer. <P>COPYRIGHT: (C)2007,JPO&INPIT |
