| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample-cooling device and an electron beam irradiation type analysis/observation apparatus having the same, which reduce deterioration, damages and the like of the sample, due to heating by an irradiation electron beam when analyzing and observing the sample of organic material, such as resin and the like deteriorating and damaged easily, by heating using an electron beam irradiation type analysis/observation apparatus, and enable to analyze and observe the sample without causing the flexibility of position, direction and the like of the sample to deteriorate. SOLUTION: A sample stage 1 is constituted of a stage 2, a Peltier element 3 provided on a surface 2a of this stage 2, a pair of fixing arms 4 and 4 provided on both sides of the Peltier element 3, where the surface of the Peltier element 3 on the side of the sample 5 acts as a cooling surface for cooling the sample 5, its surface on the side of the stage 2 act as a heat generating surface, and the heat generated from the heat generating surface is released via the stage 2. COPYRIGHT: (C)2007,JPO&INPIT
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