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发明名称
ORGANIC ANTI-REFLECTIVE COATING MATERIAL AND PREPARATION THEREOF
摘要
申请公布号
KR100687850(B1)
申请公布日期
2007.02.27
申请号
KR20000037271
申请日期
2000.06.30
申请人
发明人
分类号
G03F7/004;G03F7/11;C08F220/14;C08F220/26;C08F220/32;C08F220/36;C09D5/32;C09D133/00;G03F7/09;H01L21/027
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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