发明名称 FORMING METHOD OF SEMICONDUCTOR BULK CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a forming method of a semiconductor bulk crystal which has a large crystal size, and in which contamination by impurities from the crucible is reduced and effect of stress and strain from the wall of the crucible is reduced. SOLUTION: The semiconductor bulk crystal is formed by providing a melt of a semiconductor selected from Si, Ge and SiGe, keeping the melt at a temperature near its melting point in a crucible, thereafter forming a nucleus by immersing a seed crystal into the melt or by blowing a cooling gas onto the near center of the melt surface or by dipping either one of rods of quartz, carbon, silicon carbide, silicon nitride or a metal into the melt, and starting the solidification and the growth of the crystal therefrom. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007045640(A) 申请公布日期 2007.02.22
申请号 JP20050229260 申请日期 2005.08.08
申请人 TOHOKU UNIV 发明人 NAKAJIMA KAZUO;BAN GOKON;NOSE YOSHITARO
分类号 C30B11/14;C30B29/06 主分类号 C30B11/14
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