发明名称 LIGHT EMITTING DIODE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a high light intensity light emitting diode which greatly improves the take-out efficiency of light by efficiently roughing the surface of a light emitting diode chip having a GaAs<SB>x</SB>P<SB>1-x</SB>(0&le;x&le;1) layer and a light emitting layer containing a pn junction inside on a GaAs<SB>x</SB>P<SB>1-x</SB>(0&le;x&le;1) substrate with a specified etching mixed solution. <P>SOLUTION: The surface of a light emitting diode chip having at least a GaAs<SB>x</SB>P<SB>1-x</SB>(0&le;x&le;1) layer and a light emitting layer containing a pn junction inside on a GaAs<SB>x</SB>P<SB>1-x</SB>(0&le;x&le;1) substrate is roughed by chemical etching with a mixed solution containing iodine acid, hydrofluoric acid, and sulfuric acid. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007042851(A) 申请公布日期 2007.02.15
申请号 JP20050225095 申请日期 2005.08.03
申请人 MITSUBISHI CHEMICALS CORP 发明人 KAWAKAMI TATSUHIKO
分类号 H01L33/22;H01L21/308;H01L33/30;H01L33/40 主分类号 H01L33/22
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