| 摘要 |
PROBLEM TO BE SOLVED: To provide an OBO flat surface waveguide element with reduced power consumption. SOLUTION: The OBO flat surface waveguide element 1 is equipped with an Si substrate 102, an SiO<SB>2</SB>layer 103 formed on the Si substrate 102, and a plurality of mutually parallel Si optical waveguides 104 arranged on the Si substrate 102. A heater 107 and a heat sink 108 are arranged respectively on both side end portions of the Si substrate 102. A gradient is formed on temperature distribution of the Si substrate 102 in an aligning direction of the plurality of Si optical waveguides 104 based on functions of the heater 107 and the heat sink 108. Heat resistance of the Si susbtrate 102 in the direction of forming the gradient of the temperature distribution is larger than 20 K/W and smaller than 2,000 K/W. COPYRIGHT: (C)2007,JPO&INPIT |
