摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of excellently exposing a substrate. <P>SOLUTION: The exposure device includes a supply port 8 for supplying liquid LQ to an optical path K of exposure light, and a capturing unit 70 for capturing charged air bubbles existent in the liquid LQ. <P>COPYRIGHT: (C)2007,JPO&INPIT |