发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
摘要 A semiconductor device and a forming method thereof are provided to increase the length of a channel region by forming a bar type protrusion on a bottom portion alone of a recess gate region. An active region(120) is formed on a semiconductor substrate(100). A recess gate region(160) is formed on a predetermined portion. A gate(170) and the active region are overlapped with each other at the predetermined portion. A bar type protrusion(150) is formed at a bottom of the recess gate region. The protrusion is parallel with a length portion of the gate. The protrusion is capable of being vertical to the length portion of the gate.
申请公布号 KR100673132(B1) 申请公布日期 2007.01.22
申请号 KR20060006986 申请日期 2006.01.23
申请人 HYNIX SEMICONDUCTOR INC. 发明人 BAEK, SEUNG JOO
分类号 H01L21/335 主分类号 H01L21/335
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