SYSTEM AND METHOD FOR CONTROLLING ION DENSITY AND ENERGY USING MODULATED POWER SIGNALS

摘要

An ion density and energy control system and method are provided to enhance the growth of films and to improve the yield and the quality of films by using a modulated power signal. A modulated power signal is generated. The modulated power signal is supplied to a cathode. The modulated power signal generating step includes an AM(Amplitude Modulation) power signal generating process. The modulated power signal generating step includes an FM(Frequency Modulation) power signal generating process and a PWM(Pulse Width Modulation) power signal generating process.