发明名称 |
Integrated process condition sensing wafer and data analysis system |
摘要 |
A process condition measuring device and a handling system may be highly integrated with a production environment where the dimensions of the process condition measuring device are close to those of a production substrate and the handling system is similar to a substrate carrier used for production substrates. Process conditions may be measured with little disturbance to the production environment. Data may be transferred from a process condition measuring device to a user with little or no human intervention.
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申请公布号 |
US7151366(B2) |
申请公布日期 |
2006.12.19 |
申请号 |
US20030718269 |
申请日期 |
2003.11.19 |
申请人 |
SENSARRAY CORPORATION |
发明人 |
RENKEN WAYNE GLENN;JENSEN EARL;GORDON ROY |
分类号 |
G01R31/28;H01L21/00 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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