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经营范围
发明名称
Cathodic Sputtering Apparatus
摘要
申请公布号
KR100656734(B1)
申请公布日期
2006.12.12
申请号
KR20040062309
申请日期
2004.08.09
申请人
发明人
分类号
C23C14/35;C23C14/00;C23C14/34;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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