| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro mixer capable of efficiently mixing a plurality kinds of fluids, enabling size reduction and having less possibility of clogging of a fluid channel. SOLUTION: The micro mixer comprises a plurality of substrates with holes 10 each having a plurality of bottomed holes 18 formed on a top surface, a plurality of through holes 20 formed in a circumference of each of the plurality of bottomed holes 18 and a connecting passage 22 connecting an upper edge portion of each of the plurality of bottomed holes 18 with a top end portion of the through hole 20 in a circumference of the upper edge portion in a channel shape formed thereon, wherein the plurality of substrates with holes 10 are tightly contacted with each other by laminating them so that the through hole 20 of the substrate with holes 10 in an upper side communicates with the bottomed holes 18 of the substrate with holes 10 in a lower side, and confluence of and diversion from fluids are repeated while fluids flow in a thickness/laminated direction of the substrates with holes 10. COPYRIGHT: (C)2007,JPO&INPIT
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