发明名称 |
Holder for components in manipulator, comprises distribution plate with openings connected to vacuum generating means via micro valves |
摘要 |
<p>The holder (1) comprises a distribution plate (2) with openings extending through it, a vacuum generating means on the opposite side of the plate to its working side and individually controllable micro-valves (3, 4) in between the plate and vacuum generating means. An independent claim is also included for a manipulator with the above holder and an operating mechanism for the latter.</p> |
申请公布号 |
NL1029170(C2) |
申请公布日期 |
2006.12.05 |
申请号 |
NL20051029170 |
申请日期 |
2005.06.02 |
申请人 |
FICO B.V. |
发明人 |
HENRI JOSEPH VAN EGMOND;HENDRIK WENSINK |
分类号 |
H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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