发明名称 Holder for components in manipulator, comprises distribution plate with openings connected to vacuum generating means via micro valves
摘要 <p>The holder (1) comprises a distribution plate (2) with openings extending through it, a vacuum generating means on the opposite side of the plate to its working side and individually controllable micro-valves (3, 4) in between the plate and vacuum generating means. An independent claim is also included for a manipulator with the above holder and an operating mechanism for the latter.</p>
申请公布号 NL1029170(C2) 申请公布日期 2006.12.05
申请号 NL20051029170 申请日期 2005.06.02
申请人 FICO B.V. 发明人 HENRI JOSEPH VAN EGMOND;HENDRIK WENSINK
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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