| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film capacitor capable of eliminating the necessity of a film forming substrate and suppressing a manufacturing cost, and a manufacturing method thereof. SOLUTION: The thin-film capacitor is composed of a dielectric layer 10 and conductor layers 21, 22 formed on both surfaces of the dielectric layer 10. The dielectric layer 10 is formed by baking a ceramic green sheet containing dielectric ceramic powder and a binder, and the conductor layers 21, 22 are formed by baking a conductor green sheet containing conductive powder and a binder. At least either of the conductor layers 21, 22 is patterned, and D<SB>90</SB>of a diameter of a crystallite in its surface direction is not larger than 1/10 of the minimum dimension of a pattern or not larger than 10μm. COPYRIGHT: (C)2007,JPO&INPIT
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