发明名称 METHOD FOR FABRICATING CMOS IMAGE SENSOR
摘要 A method for fabricating CMOS image sensor is provided to obtain images of high quality by enhancing an optical absorbing rate and photoelectric conversion efficiency. A substrate(201) including a pad layer for opening a photosensitive region as a photodiode region is provided. A high temperature oxidation process for the opened photosensitive region is performed. A recess part is formed on the photosensitive region by removing an oxide layer. A SiGe layer(209) is grown on the photosensitive region to increase the optical sensitivity of the recess part. A photodiode ion implantation process for the photosensitive region including the SiGe layer is performed.
申请公布号 KR20060119598(A) 申请公布日期 2006.11.24
申请号 KR20050042735 申请日期 2005.05.20
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 CHA, HAN SEOB;LEE, JONG KON
分类号 H01L27/146 主分类号 H01L27/146
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