| 摘要 |
A micro nozzle and a method for manufacturing the same are provided to uniformly control the depth of a hydrophobic layer formed on the micro nozzle, like nozzle of an ink jet head, and to prevent the hydrophobic layer from being coated onto a rear surface of the nozzle. The device for manufacturing the micro nozzle comprises: a vacuum deposition chamber(1), carrying out the vacuum deposition in a first direction; a rotation shaft(12), arranged inside the vacuum deposition chamber(1); and a table(10), supported by the rotation shaft(12) in a rotatable manner so that a substrate with a formed micro nozzle is seated onto the table(10), wherein the table(10) forms an inclined face which is directed toward a second direction which has a determined angle against the first direction, and wherein the rotation shaft(12) is connected to the vacuum deposition chamber(1) so that the table(10) forms the inclined face.
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