| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring system for detecting collision without giving influence in measurement precision. SOLUTION: The shape measuring system 1 comprises: a probe 5 being in contact with an object 3 to be measured by possessing a measuring piece 2; a guide part 6 for movably supporting the probe 5 in an X axis direction on a drawing; a drive part 7 for relatively moving the probe 5 to the object 3 to be measured by moving the guide part 6 in the X axis direction; a drive force transmission part 10 for transmitting force from the drive part 7 on the guide part 6 through a pair of impact absorption members 8A and 8B by possessing the pair of the impact absorption members (elastic members) 8A and 8B; a position detection part 11 for detecting a relative position of the object 3 to be measured and the guide part 6; a deformation amount detection part 12 for detecting a deformation amount of the pair of the impact absorption members 8A and 8B; a base 13 for mounting the guide part 6 and the drive part 7; and a control part 15 for controlling them by electrically connecting the position detection part 11, the deformation amount detection part 12 and the drive part 7. COPYRIGHT: (C)2007,JPO&INPIT
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