| 发明名称 |
Method for fabricating a lateral metal-insulator-metal capacitor |
| 摘要 |
A lateral metal-insulator-metal capacitor fabricated with consistent dummy fill and slotting patterns that assure predictable and controlled performance from the metalization layout while conforming to process design rules.
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| 申请公布号 |
US7135366(B2) |
申请公布日期 |
2006.11.14 |
| 申请号 |
US20030738256 |
申请日期 |
2003.12.17 |
| 申请人 |
ROTELLA FRANCIS M |
发明人 |
ROTELLA FRANCIS M. |
| 分类号 |
H01L21/20;H01L21/02;H01L23/522;H01L27/08 |
主分类号 |
H01L21/20 |
| 代理机构 |
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