METHOD FOR CLEANING DEPOSITION CHAMBERS FOR HIGH DIELECTRIC CONSTANT MATERIALS,申请号KR20040096874-传众专利搜索

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发明名称	METHOD FOR CLEANING DEPOSITION CHAMBERS FOR HIGH DIELECTRIC CONSTANT MATERIALS
摘要
申请公布号	KR100644176(B1)	申请公布日期	2006.11.10
申请号	KR20040096874	申请日期	2004.11.24
申请人		发明人
分类号	H01L21/304;C23C16/44;H01L21/3065;H01L21/31;H01L21/316	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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