发明名称 MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing apparatus and method for a semiconductor device allowing considerable reduction in connection failure between a wiring electrode of the circuit mounting substrate for subjecting a semiconductor element to flip mounting and a metal bump formed in the electrode pad of the semiconductor element. <P>SOLUTION: The manufacturing apparatus for a semiconductor device includes a machining means for forming a recess 10 on a wiring electrode 2 of a circuit mounting substrate 1 for subjecting a semiconductor element to flip mounting, and includes an applying means for applying a conductive bonding agent to the recess. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006310536(A) 申请公布日期 2006.11.09
申请号 JP20050131225 申请日期 2005.04.28
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 ISHIKAWA KAZUHIRO
分类号 H01L21/60 主分类号 H01L21/60
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