| 摘要 |
PROBLEM TO BE SOLVED: To easily and precisely adjust eccentricity and inclination of a machining reference plane of a workpiece having a symmetric shape with respect to the rotation axis, and to precisely machine the workpiece. SOLUTION: The workpiece holding device is equipped with: a machining machine spindle 1 where a flat surface 3 is formed on a first air passage 2 and its opening side; an inclination adjusting member 8 which is coaxially disposed on the processing machine spindle 1 and has a mounting surface 10 of the workpiece and a convex spherical surface 9; and an eccentric adjusting member 4 which is disposed between the processing machine spindle 1 and the inclination adjusting member 8, has a flat surface 5 which is joined to the flat surface 3 and adjustable in the b direction with respect to the rotation axis 1a, and a concave spherical surface 6 which is jointed to the convex spherical surface 9 and adjustable in the a direction with respect to the rotation axis 1a, and an eccentric adjusting member 4, in which a second air passage 7 communicating to the first air passage 2 is through-formed. The inclination adjusting member 8 and the eccentric adjusting member 4 are fixedly held to the processing machine spindle 1 with vacuum suction. COPYRIGHT: (C)2007,JPO&INPIT
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