发明名称 |
Exhaust system and mini-exhaust static pressure controlling apparatus thereof |
摘要 |
An exhaust system and a mini-exhaust static pressure controlling apparatus thereof for controlling a process area. The mini-exhaust static pressure controlling apparatus has an exhaust chamber and an auto release damping device. The exhaust chamber has an air inlet connected to the process area receiving air exhaust from the process area, and an air outlet venting the air exhaust. The auto release damping device has a diaphragm pre-stressed in an arc shape with a coefficient of elasticity and an adjusting device for applying a stress on the diaphragm to maintain the arc shape of the diaphragm, and is disposed on the exhaust chamber to control static pressure of the air exhaust in the exhaust chamber.
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申请公布号 |
US2006237073(A1) |
申请公布日期 |
2006.10.26 |
申请号 |
US20050110779 |
申请日期 |
2005.04.21 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
KUO PO-SUNG;CHEN YUNG-DAR;KUO DAR-RUNG;WEN MING-CHIEN;WANG MING-TSONG |
分类号 |
F16K15/14 |
主分类号 |
F16K15/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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