发明名称 Semiconductor wafer package and manufacturing method thereof
摘要 A manufacturing method of a semiconductor wafer package mainly comprises the following steps. Firstly, a semiconductor wafer having a plurality of bonding pads and a passivation layer exposing the bonding pads is provided. Next, under bump metallurgy layers are formed on each of the bonding pads respectively. Then, a mask is formed above the semiconductor wafer to expose the under bump metallurgy layers through each of the openings of the mask. Afterwards, a plurality of bump structures are disposed separately in the openings wherein each of the bump structures has a bump and a reinforced layer covering the bump. Finally, a reflow step is performed so that each of the reflowed bumps is connected to the corresponding under bump metallurgy layer and the reinforced layers are transformed into bump-reinforced collars to cover the under bump metallurgy layers and encompass the bumps. In addition, a semiconductor wafer package, which is formed by the manufacturing method, is provided.
申请公布号 US7122459(B2) 申请公布日期 2006.10.17
申请号 US20040874238 申请日期 2004.06.24
申请人 ADVANCED SEMICONDUCTOR ENGINEERING, INC. 发明人 FENG YAO-HSIN
分类号 H01L21/44;H01L21/60;H01L23/485 主分类号 H01L21/44
代理机构 代理人
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