发明名称 APPARATUS FOR MAKING PATTERN AND METHOD OF MAKING PATTERN USING THE SAME
摘要 <p>A pattern forming apparatus and a pattern forming method using the same are provided to acquire a high quality pattern at low costs. A pattern forming apparatus includes a loading unit, a support body, a soft mold and a vertical driving unit. The loading unit(10) is used for loading stably a pattern forming object. The support body(30) is installed on the loading unit. The soft mold(20) is installed between the support body and the loading unit. At least one side of the soft mold is connected with the support body. The vertical driving unit is used for moving the support body up and down.</p>
申请公布号 KR100632741(B1) 申请公布日期 2006.09.29
申请号 KR20050111783 申请日期 2005.11.22
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, TAE YUN;LEE, MOON GU;KIM, JEONG GIL;LEE, SUK WON;PARK, JUNG WOO;CHO, SUNG HOON;KIM, JUNG HYEON;LEE, JUN YOUNG
分类号 H01L21/027 主分类号 H01L21/027
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