| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To eliminate partial swell of a protective sheet S by preventing ingress of assist gas between the protective sheet S and a surface of a plate W, and to simplify the post-processing by preventing a scorched portion of the protective sheet S from being stuck on a back side of the plate W. <P>SOLUTION: The laser beam machining apparatus has: an air dryer 39 which is connected to an air compressor 41 to feed air and dries air; a heat exchanger 47 which is connected to the air dryer 39 and cools the temperature of the dried air to zero or below; and air nozzles 51, 55, 59 which are connected to the heat exchanger 47 and eject cooled air toward a portion in the vicinity of a part to be machined of the plate W. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
