THERMAL FLOW MEASUREMENT DEVICE

摘要

Conventional thermal flow measurement devices lack consideration for an automobile against severe environment. The inventive thermal flow measurement device includes a detection element consisting of, all formed on the surface of a thin portion (diaphragm) which is formed on a planar substrate of silicon or ceramic exhibiting good thermal conductivity, a heating resistor as a heater heated to a temperature having a predetermined temperature difference from the temperature of air flow being measured, temperature detecting resistors as temperature detecting means on the opposite sides of the heating resistor, a wiring portion composed of an electric conductor having a melting point of 2000°C or above and leading out signal lines from the heating resistor and the temperature detecting resistors, and a pad.