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发明名称
Vorrichtung und Verfahren zur Überprüfung eines Resistmusters
摘要
申请公布号
DE60025878(T2)
申请公布日期
2006.09.28
申请号
DE20006025878T
申请日期
2000.11.30
申请人
SONY CORP.
发明人
IMAI, YUTAKA;TAGUCHI, AYUMU;TAMADA, HITOSHI;WADA, HIROYUKI
分类号
G01B11/24;G01N21/956;G01N21/88;G03F7/20;G03F7/26;H01L21/027;H01L21/66
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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