| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a diaphragm pump capable of having high discharge pressure and reducing load on diaphragms by differential pressure. <P>SOLUTION: The diaphragm pump comprises a pump chamber 17 comparted in a housing 12, the first diaphragm 16 mainly sealing the pump chamber 17, a pressure regulation chamber 30 comparted in the housing 12 with the separation by the first diaphragm 16, the second diaphragm 27 mainly sealing the pressure regulation chamber 30, a drive mechanism for deforming the first diaphragm 16 and the second diaphragm 27 and an introduction passage 31 for introducing a part of discharge fluid discharged from the pump chamber 17 to the pressure regulation chamber 30, wherein a pressure regulating valve 32 is provided in the middle of the introduction passage 31 for regulating pressure of the pressure regulating chamber 30 to an intermediate pressure between a suction pressure and a discharge pressure. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
