Thin film forming device, method of forming a thin film, and self-light-emitting device

摘要

Measure of forming an EL layer by selectively depositing through evaporation a material for forming the EL layer at a desired location is provided. When a material for forming an EL layer is deposited, a mask ( 113 ) is provided between a sample boat ( 111 ) and a substrate ( 110 ). By applying voltage to the mask ( 113 ), the direction of progress of the material for forming the EL layer is controlled to be selectively deposited at a desired location.