| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element in which crosstalk between adjacent individual electrodes in an active layer, and deformation of an element to the side opposite to a displacement transmitting surface are prevented certainly. SOLUTION: A multilayer piezoelectric element 1 comprises an active layer 2, and a restriction layer 4 laid in layer for the active layer 2. The active layer 2 has a piezoelectric 5, internal individual electrodes 6, and an internal common electrode 7 opposing each other while sandwiching the piezoelectric 5, and displaces when a voltage is applied between these electrodes 6 and 7. The restriction layer 4 has a plurality of piezoelectrics 8 laid in layers, and individual interconnection electrodes 9 and a common interconnection electrode 10 arranged between the piezoelectrics 8 of respective layers, and regulates displacement of the active layer 2 for one side. On the upper surface of the restriction layer 4, individual terminal electrodes 11 for applying a voltage to the internal individual electrodes 6, and a common terminal electrode 12 for applying a voltage to the internal common electrode 7 are provided. Each piezoelectric 8 is thicker than the piezoelectric 5. COPYRIGHT: (C)2006,JPO&NCIPI
|
