| 发明名称 |
METHODS AND SYSTEMS FOR HANDLING WORKPIECES IN A VACUUM-BASED SEMICONDUCTOR HANDLING SYSTEM |
| 摘要 |
<p>Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules.</p> |
| 申请公布号 |
IL175518(D0) |
申请公布日期 |
2006.09.05 |
| 申请号 |
IL20060175518 |
申请日期 |
2006.05.09 |
| 申请人 |
BLUESHIFT TECHNOLOGIES, INC.;PETER VAN DER MEULEN |
发明人 |
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| 分类号 |
B25J17/00;B65G1/00;B66C1/00;F26B5/04;F26B13/30;G06F7/00;G06F19/00;H01L;H01L21/00;H01L21/677 |
主分类号 |
B25J17/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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