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发明名称
MICROMACHINED STRUCTURE USABLE IN PRESSURE REGULATING MICROVALVE AND PROPORTIONAL MICROVALVE
摘要
申请公布号
EP1415210(B1)
申请公布日期
2006.08.30
申请号
EP20020763398
申请日期
2002.07.31
申请人
KELSEY-HAYES COMPANY
发明人
HUNNICUTT, HARRY, A.
分类号
G05D16/04;F15B13/04;F15C5/00;F16K99/00;G05D16/10
主分类号
G05D16/04
代理机构
代理人
主权项
地址
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