| 摘要 |
PROBLEM TO BE SOLVED: To form a cantilever structure directly on a porous layer without depositing a membrane layer by forming the cantilever on the membrane layer, and then etching the membrane layer so as to manufacture the cantilever structure floating off a cavity, and form a fluid channel comprising at least one inlet hole and at least one outlet hole formed in the porous layer and the membrane layer through the structure to be sealed. SOLUTION: In this method for manufacturing the MEMS structure, an upper part of a substrate is formed of the porous layer as a range for forming the cavity is eliminated, the substrate under the porous layer is etched in prescribed thickness to form the cavity, the membrane layer is formed on an upper surface of the substrate to seal the cavity, and the structure is formed on the membrane layer. COPYRIGHT: (C)2006,JPO&NCIPI
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