THIN-FILM TRANSISTOR DISPLAY PANEL AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To decrease the fraction defective of thin-film transistors by simplifying the manufacturing stage of a thin-film transistor panel. SOLUTION: The manufacturing method of the thin-film transistor display panel includes stages of: forming gate lines on a substrate; forming a 1st insulating film on the gate lines; forming a semiconductor layer on the 1st insulating film; forming data lines and drain electrodes on the semiconductor layer; vapor-depositing a 2nd insulating film on the data lines and drain electrodes; forming a photosensitive film on the 2nd insulating film; exposing at least portions of the drain electrodes and at least a portion of the substrate by etching the 2nd insulating film and 1st insulating film by using the photosensitive film as a mask; removing portions of the exposed drain electrodes; vapor-depositing a conductive film; and forming pixel electrodes coupled to the drain electrodes by removing the photosensitive film. COPYRIGHT: (C)2006,JPO&NCIPI