发明名称 Method for manufacturing industrial products and combination of masks for manufacturing the same
摘要 A method for manufacturing an industrial product encompasses: forming a intermediate product pattern, which implements a part of a intermediate product of the industrial product by a sequence of processes corresponds to a part of a procedure for manufacturing the industrial product; forming an interconnect-changing insulator on the intermediate product pattern; boring sampling contact holes in the interconnect-changing insulator so as to make bare a part of the intermediate product pattern to define sampling sites; delineating evaluation interconnects on the interconnect-changing insulator so that each of the evaluation interconnects can electrically connected to at least one of the sampling sites of intermediate product pattern; and measuring an electrical resistance between subject sampling sites through the evaluation interconnects so as to detect a product defect in the intermediate product pattern.
申请公布号 US2006166384(A1) 申请公布日期 2006.07.27
申请号 US20060325545 申请日期 2006.01.05
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TATSUMI YUUICHI
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
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