| 摘要 |
A micro-accelerometer includes first and second closed cavities, into each of which an equal quantity of gas is introduced. A membrane partitions the symmetrical first and second cavities. Temperature sensors are provided within the first and second cavities, respectively, to measure the gas temperatures within the cavities. Difference of temperature is not caused so long as no acceleration affects the inner side of the cavities. However, if a linear acceleration is applied, the membrane is deformed in the direction of acceleration, whereby for example, the gas within the first temperature is compressed and its temperature increases, whereas the temperature of the second cavity decreases because the gas is expanded within the second cavity. The difference of gas temperatures between the first and second cavities is measured as a variation of electric power resistance by the temperature sensors and applied as a function of acceleration.
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