PRECURSOR COMPOSITION, METHOD OF MANUFACTURING PRECURSOR COMPOSITION, INK FOR INKJET APPLICATION, METHOD OF MANUFACTURING FERROELECTRIC FILM, PIEZOELECTRIC DEVICE, SEMICONDUCTOR APPARATUS, PIEZOELECTRIC ACTUATOR, INKJET RECORDING HEAD, AND INKJET PRINTER

摘要

PROBLEM TO BE SOLVED: To provide a precursor composition for forming a ferroelectric material having a good compositional controllability in a liquid phase process and a reusability of a metal component such as lead, a method of manufacturing the precursor composition, and a method of manufacturing a ferroelectric film using the precursor composition.

SOLUTION: The precursor composition contains a precursor for forming a ferroelectric material and the ferroelectric material is represented by general formula: AB1-xCxO3, wherein element A comprises at least Pb; element B comprises at least one among Zr, Ti, V, W and Hf; and element C comprises at least one between Nb and Ta. The precursor contains at least the element B and the element C and partly has an ester linkage. The precursor is dissolved or dispersed in an organic solvent containing at least a first alcohol and a second alcohol having a boiling point and viscosity higher than those of the first alcohol.

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