发明名称 |
Method of forming gate insulation layers of different characteristics |
摘要 |
The present invention describes a method for forming different types of gate insulation layers, wherein the formation of one type of gate insulation layer is highly decoupled from the formation of the other type of gate insulation layer. Thus, in some embodiments, critical oxidation processes may finely be tuned on an individual basis. This is accomplished by providing a mask layer that may substantially prevent any impact on an initially made insulation layer during a subsequent manufacturing process of a second gate insulation layer.
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申请公布号 |
US2006148163(A1) |
申请公布日期 |
2006.07.06 |
申请号 |
US20050196881 |
申请日期 |
2005.08.04 |
申请人 |
WIECZOREK KARSTEN;KAMMLER THORSTEN;REICHEL CARSTEN |
发明人 |
WIECZOREK KARSTEN;KAMMLER THORSTEN;REICHEL CARSTEN |
分类号 |
H01L21/8238;H01L21/31;H01L21/336 |
主分类号 |
H01L21/8238 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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