| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage apparatus capable of performing the stable movement of its gantry independently of its environmental condition. SOLUTION: The stage apparatus has a pair of guides so disposed on a base as to interpose a predetermined space between them, a gantry 3 supported movably by the pair of guides, Y-axis linear motors for driving the gantry 3 along the pair of guides, and bearing units 4a mounted on both the ends of the gantry 3. Each bearing unit 4a has carriages 41 disposed in the periphery of the gantry 3, and has a slide bearing 42 fastened to the carriages 41 and for allowing the gantry 3 to be displaced in the direction orthogonal to the moving direction of the gantry 3. COPYRIGHT: (C)2006,JPO&NCIPI |
