发明名称 |
METHOD FOR SELECTIVE COATING OF A COMPOSITE SURFACE PRODUCTION OF MICROELECTRONIC INTERCONNECTIONS USING SAID METHOD AND INTEGRATED CIRCUITS |
摘要 |
The invention relates to a method for selective coating of specific regions of a composite surface with a conducting film, a method for production of microelectronic interconnections, methods and processes for the production of integrated circuits and, more particularly, the formation of networks of metallic interconnections. The invention further relates to methods and processes for the production of microsystems and connectors. |
申请公布号 |
WO2005098087(A3) |
申请公布日期 |
2006.05.18 |
申请号 |
WO2005FR00693 |
申请日期 |
2005.03.22 |
申请人 |
ALCHIMER;BUREAU, CHRISTOPHE;AMEUR, SAMI |
发明人 |
BUREAU, CHRISTOPHE;AMEUR, SAMI |
分类号 |
C23C18/16;B05B1/34;B05B11/00;B05B11/04;C23C18/30;C23C18/31;H01L21/288;H01L21/768 |
主分类号 |
C23C18/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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