| 摘要 |
PROBLEM TO BE SOLVED: To improve the efficiency of an air purging operation. SOLUTION: In an air purging method for replacing the air existing in a gas delivery piping (A) with a replacing gas, the gas delivery piping (A) having a plurality of branch pipes 3 connected to a main pipe 2 connected to an existing pipe 4, after the air existing in the main pipe has been replaced with the replacing gas by supplying the replacing gas into the main pipe in the state that the end portions of the branch pipes are closed, a replacing process for leaving the piping intact, such that the replacing gas existing in the main pipe and the air existing in the branch pipes are mixed with each other, is repeated until the density of the gas existing in the branch pipes after leaving the piping intact has arrived to a required density. COPYRIGHT: (C)2006,JPO&NCIPI
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