APPARATUS FOR REMOVING IMPURITIES ON WAFER,申请号KR20040081930-传众专利搜索

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发明名称	APPARATUS FOR REMOVING IMPURITIES ON WAFER
摘要
申请公布号	KR20060032914(A)	申请公布日期	2006.04.18
申请号	KR20040081930	申请日期	2004.10.13
申请人	DONGBU ELECTRONICS CO., LTD.	发明人	LEE, IL HO
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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